Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods

Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, coating that combines multi-layer thin films with single top-oblique deposited layer. By simply introducing low-refractive index layer, broadband properties can be improved while simplifying preparation. Precise time-controlled oblique-angle deposition (OAD) methods were used to fabricate AR coating. accurately measuring adjusting design errors thick film layers, 22-layer 36-layer on sapphire substrate 400–2000 nm wideband obtained. This bottom-up preparation process have potential significantly enhance antireflective many systems reduce manufacturing cost coatings.